Automatic Surface Analysis System

AutoSIMS represents the sum of a combination of instrument developments undertaken for a range of customers. The result is an easy to use general purpose laboratory tool that can
undertake routine surface analysis measurements for product monitoring, failure analysis and verification tasks. Based around the geometry of the Compact SIMS, the AutoSIMS brings a
very high level of automation to surface analysis with a typical user training period of under a day required to perform both surface, imaging and 3D depth profiles.

The small footprint and self-contained nature of the tool mean that it can be installed almost anywhere and the modular construction allows easy servicing and maintenance. Just like the
rest of the Hiden SIMS tool family, the AutoSIMS boasts a very low cost of ownership and coupled with a high reliability and up-time.

Samples are loaded via a modular cassette sample holder and positioned using the computer driven high precision stage. Stored ion gun and analysis recipes will run the tool in fully automatic mode, reporting results in either spreadsheet or custom formats. The long life oxygen ion gun provides a stable beam for the full working day – and night, delivering surface spectra and 3D depth profiles.

Analysis position and recipe can also be defined using a simple spreadsheet, allowing the non-expert user to complete a complex experimental matrix with ease. Although the tool is designed to be run by non-specialist technicians, the full range of SIMS parameters are available to more advanced users and the AutoSIMS can be used as a formidable research tool in its own right delivering unrivalled depth resolution and cost of ownership at this price.