Residual Gas Analysis
Analysis of gas and vapour species in vacuum chambers and processes
Systems for the examination of components present in a vessel or evolved from a process
Measures the concentration of gases and vapours in real time
All Hiden residual gas analysers are application tested and calibrated to provide the highest quality performance, and they are backed by a 3 year warranty and lifetime service support.
A range of electron impact ion sources that can be supplied with any of our residual gas analysers
Configures residual gas analysers for specific applications, molecular beam analysis for example
Hiden Analytical produces a wide variety of ion source types which can be fitted to our full range of RGAs. Ion source types are crucial to the performance of a RGA and having the ability to specify which source you require ensures our RGAs are custom configured for specific applications.
A dual mode RGA system for vacuum diagnostics and process monitoring without differential pumping
Measures the residual gases, process contaminates and provides for leak detection
The Hiden HMT quadrupole mass spectrometer is a unique dual mode RGA system capable of operating at pressures up to 4 x 10-3 mbar without the need for differential pumping. Operation at this pressure is achieved using a specially designed ion source/quadrupole filter combination and software which corrects for abundance non-linearity. The unique high pressure specification makes the HMT ideal for process monitoring applications.
A Residual Gas Analyser configured for demanding UHV applications
Measures the concentration of gases and vapours in real time
A residual gas system configured for molecular beam epitaxy applications
Measures residual gases and provides for contamination and leak detection in MBE systems
The Hiden HALO systems are designed for RGA, gas analysis and process monitoring applications including leak detection, trend analysis and vacuum survey.
A system for fast event UHV studies
Measures the partial pressures of species at UHV with pulse ion counting detection
Hiden’s 3F PIC Series Quadrupoles are high precision triple filter analysers with digital detectors for ultimate sensitivity and time resolution in UHV TPD applications.
A system for analysis of ions, neutrals and radicals in UHV desorption studies
Measures ions and neutrals in electron and photon stimulated desorption
The Hiden IDP is for the direct analysis of low energy ions from UHV surface science techniques. Applications include electron stimulated desorption, photon stimulated desorption and thermal desorption studies.
A system for UHV analysis of neutrals, radicals and ions
Measures the ions, neutrals, and partial pressures in UHV/XHV
The Hiden EPIC and IDP have all the features of high performance RGAs - but with the addition of pole bias mid-axis potential and negative ion capability making them outstanding research grade mass spectrometers.
A system for high precision scientific and process applications
Measures the partial pressures of residual gases with ultra high resolution and extended mass range options to 1000 AMU
The HAL 3F RC systems are designed for gas analysis in high precision scientific and process applications.
A system for multiple source monitoring in MBE deposition applications
For molecular beam analysis and deposition rate control
Molecular beam sources require accurate control for reproducible production quality thin film growth. Hiden’s XBS system provides in-situ monitoring of multiple sources with real-time signal output for precise control of the deposition.
A system for tokamak/torus fusion research
The DLS-1 (quadrupole residual gas analyser) is designed for analysis of fusion system fuel delivery, and operates in TIMS mode. TIMS mode provides for control of the energy of the electrons emitted within the ionisation source, resulting in each species, D2 and 4He for example having a unique fingerprint that can be determined by DLS-1. This mode of operation is known as Threshold Ionisation Mass Spectrometry (TIMS).
Ultra High Resolution Quadrupole Mass Spectrometer
Ultra The Hiden DLS-10 QMS is a quadrupole mass spectrometer specifically designed for the analysis of Hydrogen and Helium Isotopes and light gases and includes a new Hiden mass filter designed for ultra high resolution.
The new mass filter design is a micron precision assembly using the finest precision machined components.
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Ultra High Resolution Quadrupole Mass Spectrometer
Ultra The Hiden DLS-20 QMS is a quadrupole mass spectrometer specifically designed for the analysis of Hydrogen and Helium Isotopes and light gases and includes a new Hiden mass filter designed for ultra high resolution.
The new mass filter design is a micron precision assembly using the finest precision machined components.
A system for tokamak/torus fusion research with remote analyser mounting up to 80m from sensitive electronics
Includes the DLS-1 system TIMS mode for Measurement the concentration of fusion fuel gas purity including hydrogen isotopes, deuterium in helium for example.