A SIMS/SNMS analyser
When used in SIMS/SNMS system- provides for surface composition and elemental mapping
The Hiden MAXIM quadrupole SIMS analyser is a state of the art secondary ion mass spectrometer for positive and negative, static, dynamic and neutral analytical applications.
The MAXIM analyser system includes an integral energy filter for ion acceptance at 30° to the probe axis, high transmission SIMS extraction optics, triple mass filter, pulse ion counting detector and control electronics.
Overview
The 30° acceptance angle allows the MAXIM to be mounted with its axis parallel to the plane of the sample, leaving a clear view of the sampled area for other light or ion optics. The MAXIM is tolerant of sample charging making it an ideal probe for the analysis of insulators. Also, large acceptance angle allows for wide area imaging.
Features
- Mass range options: 300amu, 500amu or 1000amu
- Detector: Ion counting detector, Positive and Negative ion detection, 107 cps
- Mass filter: Triple filter
- Pole diameter: 9mm
- Bakeout: 250°C
- Ion energy filter: 30° angular acceptance
- Ioniser: Electron bombardment, single filament for SNMS and RGA
Specifications
|
Mass range |
300, 510 or 1000 amu |
|
Ion analysis |
Positive and negative ions |
|
Ion energy analysis |
100 eV |
|
Sensitivity |
> 106 counts/second per nanoamp for Aluminium |
|
SIMS - Secondary Ion Mass Spectrometry |
Yes |
|
Analysis of ions ejected from sample surface |
Yes (primary ions of oxygen, argon or caesium) |
|
SNMS - Secondary Neutral Mass Spectrometry |
Yes |
|
Analysis of ions ejected from sample surface |
Yes (primary ions of oxygen, argon or caesium) |
|
Residual gas analysis mode- RGA |
Leak detection and chamber vacuum analysis |