Un sistema UHV per l'analisi delle superfici e il profiling dei film sottili

Uno strumento rivoluzionario per l'analisi delle superfici

Lo strumento Compact SIMS della Hiden è stato progettato per la caratterizzazione facile e veloce delle strutture stratificate, delle contaminazioni e delle impurità superficiali. Lo strumento rileva gli ioni positivi, assistito dal fascio primario di ioni di ossigeno, ed è in grado di discriminare isotopi su tutta la tavola periodica degli elementi. La geometria del cannone di ioni è ottimizzata per essere ideale per ottenere una risoluzione nanometrica in profondità vicino alla superficie.


The Hiden Compact SIMS tool is designed for fast and easy characterisation of layer structures, surface contamination and impurities with sensitive detection of positive ions being assisted by the oxygen primary ion beam and provides isotopic sensitivity across the entire periodic table. The ion gun geometry is optimised to be ideal for nanometre depth resolution and near surface analysis.

A rotary carousel enables 10 samples to be simultaneously loaded for measurement into the dry-pumped vacuum chamber. The instrument has a small footprint and is exceptionally easy to use, it boasts the same control software and ion gun system as the fully featured Hiden SIMS Workstation family, providing depth profiles, 3D and 2D images and mass spectral data. The MAXIM-600P detector is based around the highly reliable Hiden 6mm triple quadrupole mass filter with pulse ion detection. An electron gun option is available for analysis of insulating samples.

In addition to SIMS, the Compact SIMS has an SNMS facility that is useful for quantification of high concentration elements, such as alloys.


  • Small footprint
  • Easy user friendly layout
  • Requires only single phase electrical power (under 10A)
  • Wheeled trolley design
  • Positive SIMS and SNMS
  • Depth Profiling
  • 3D characterisation and imaging
  • Mass spectra
  • Isotopic analysis
  • Analysis on the nanometre scale


Mass range

50, 300, 510 or 1000 amu

Minimum detectable concentration


SIMS - Secondary Ion Mass Spectrometry 


Analysis of ions ejected from sample surface

 Yes (primary ions oxygen or argon)

SNMS - Secondary Neutral Mass Spectrometry


Analysis of ions ejected from sample surface

 Yes (primary ions oxygen or argon)

Depth resolution

 3 nm

Minimum detectable concentration - SIMS

 1017 atoms cm-3

Minimum detectable concentration - SNMS


UHV multiport chamber

 No, fixed geometry easy entry chamber

Accommodates additional instrumentation