Un analizzatore di gas residui configurato per applicazioni di epitassia a fascio molecolare
Misura i gas residui e individia contaminazioni e perdite in sistemi MBE
I sistemi HALO sono progettati per l'analisi dei gas residui e per applicazioni di monitoraggio di processi, fra cui la rilevazione delle perdite, l'analisi degli andamenti e il controllo del vuoto.
Overview
The MBE specific analyser is constructed from compatible materials and designed for prolonged use in MBE environments and include
Features
- Molybdenum wiring in place of copper wiring to improve RGA system lifetime in MBE environments
- Contamination resistant ion source shroud
- Dual Faraday/channelplate electron multiplier
- Minimum detectable partial pressure to 2 x 10-13 mbar
- Thermal extender option for RGA operation during bakeout
Specifications
|
Mass range |
200 or 300 amu |
|
Minimum detectable partial pressure |
2 x 10-13 mbar |
|
Leak detect mode |
Set to use helium search gas as standard |
|
Detector |
Faraday cup and Electron multiplier |
|
Quadrupole gauge construction configured for MBE |
Yes |
|
Molybdenum gauge wiring instead of copper |
Yes |
|
Ion source shroud to prevent contamination |
Yes |
|
Thermal extender for RGA operation during bakeout |
Yes (Optional) |
|
Mounting flange |
DN-35-CF (70mm OD Conflat type) |