Un sistema per l'analisi di neutri, radicali e ioni in UHV

Misura gli ioni, i neutri e i radicali in UHV/XHV

I sistemi EPIC e IDP hanno tutte le caratteristiche di sistemi ad alte prestazioni per l'analisi dei gas residui - ma con l'aggiunta di un bias e la capacità di misurare ioni negativi che li rendono spettrometri di massa eccezionali per la ricerca.


The EPIC system is factory-upgradeable for the inclusion of an energy-filter, either the Bessel box or 45 degree sector field type, ensuring compatibility with the Hiden plasma/SIMS series including the EQP, EQSPSM and SIM probes.


  • Mass range options to 2500 amu, 6 or 9 mm pole diameter options
  • Enhanced long-term Stability (less than ±0.5% height variation over 24 h)
  • Ion Energy distribution by mid-axis potential scanning ±100 V, 1000 eV Option
  • Ion source control for soft ionisation and appearance potential mass spectrometry
  • Enhanced sensitivity for high mass transmission, Automatic mass scale alignment
  • Pulse Ion Counter for continuous 1: 107 c/s decade dynamic range
  • Extended dynamic range  to 5x1010 c/s with Faraday option
  • Enhanced contamination resistance via the RF-only pre-filter stage
  • Signal gating 100 nano second resolution for energy & mass distributions vs time or TOF studies
  • Temperature reading integrated into data displays for thermal desorption applications
  • Integral UHV compatible shroud, Liquid Nitrogen cooled shroud option
  • MASsoft control via RS232, USB or Ethernet LAN
  • Upgradeable to Plasma / SIMS specification


Mass range

50, 300, 510, 1000, or 2500 amu

Pulse ion counting detector

Positive and negative ion detection

DMM-dynamic multi mode

Uniquely applied for the electron attachment ionization technique for electronegative gas studies

Minimum detectable partial pressure

5 X 10-15 mbar : 1X10-16 mbar

Fast measurement speed

Up to 500 measurements per second

 Analyser mounting flange  

6mm pole diameter Mounting flange

9mm pole diameter Mounting flange


DN-63-CF (4.5"/114mm OD Conflat type) 

DN-100-CF (6"/150mm OD Conflat type)


6mm pole diameter systems adaptor

9mm pole diameter systems adaptor


DN-35-CF (2.75”/70mm OD Conflat type)

DN-63-CF (4.5”/114mm OD Conflat type)