A mass and energy analyser for plasma diagnostics
Measures mass spectra of ions, neutrals and radicals in plasma
Hiden plasma probes measure some of the key plasma parameters and provide detailed information relating to plasma reaction chemistry.
Overview
Features
- Differentially pumped manifold with mounting flange to process chamber
- High sensitivity / stability triple filter quadrupole, mass range options to 510amu
- Pulse ion counting detector with 7 decade dynamic range
- Energy analysis option by pole bias scanning 100eV
- Ion extraction / exclusion optics with tuneable integral ioniser for Appearance Potential MS
- Penning gauge and interlocks to provide over pressure protection
- Signal gating and programmable signal gating option for time resolved studies in pulsed plasma
- Analysis of neutrals and radicals as standard, +ve / -ve ion analysis option
- Mu-Metal, Radio-metal shielding options, high pressure operation options
- MASsoft control via RS232, RS485 or Ethernet LAN
Specifications
Mass range |
300 or 510 amu |
Ion Analysis |
Positive ions |
Ion Analysis - option |
Negative ions |
Neutral analysis |
Neutrals and neutral radicals analysis |
Plasma pressure |
Up to 0.5 mbar |
Energy analysis range |
100 eV |