An advanced Langmuir probe for plasma diagnostics
Measures electrical properties of low pressure plasma
Routine monitoring of the I-V plasma characteristic by the Hiden ESPion probe gives direct information relating to plasma stability and reproducibility. Automatic real-time extrapolation of plasma parameters gives detailed information on plasma properties for use in characterisation and uniformity monitoring.
Overview
Features
- 15 scans per sec acquisition rate with D-O-E interface for auto, semi or manual analyses
- Hiden pioneers in passive RF compensation
- ESPion has the highest blocking impedance of any commercially available unit
- 4.25MOhm at 13.56 MHz cf. 100kOhm
- Gas cooled multi-inductor chain for high temperature plasma operation
- Gas cooled multi-inductor chain is user replaceable for tuning to other frequencies
- Reference probe compensates for low frequency effects
- e.g. shift in the plasma potential (e.g. anodised chamber walls) or noise (e.g. power supply)
- ESPion the fastest pulsed plasma specifications of any commercial probe
- ESPsoft contains all necessary gating circuitry as standard
- 300, 600 or 915mm auto linear drive options
- Interlocked isolation valve, 90° probes, combined linear – rotary drives options available
- Self-cleaning cycle to limit probe tip contamination
- ESPsoft control via RS232, RS485 or Ethernet LAN
Specifications
Plasma types |
For DC, RF, pulsed or ECR |
Ion and electron density |
1014 - 1019 m3 |
Electron temperature |
Up to 10 eV |
Plasma pressure |
Up to 0.5 mbar |
Z- motion drive option |
300, 600 or 900 mm |
Brochures