A system for UHV temperature programmed desorption (TPD) studies
Measures the temperature programmed desorption from solid thin film samples
The TPD Workstation features a multiport UHV chamber with heated sample stage coupled to a high precision triple filter analyser with digital pulse ion counting detector for ultimate sensitivity and time resolution.
Overview
The Hiden TPD Workstation is a complete experimental system for UHV temperature programmed desorption (TPD) studies. The triple filter mass analyser is configured with a cooled shroud giving the analyser optimum sensitivity with minimum background contributions to desorption products from the sample. A fast sample load lock with sample transfer mechanism is included to provide for rapid sample change.
Features
Specifications
Mass range |
300 or 510, or 1000 amu |
Heated sample stage |
Ambient to 1000oC |
Ramp rate |
20 - 40 oC per minute |
Detector |
Pulse ion counting |
3D real time display |
Yes |
Multiple data views |
Yes |
Peak integration and deconvolution |
Yes |
Background subtraction |
Yes |
UHV multiport chamber |
Yes |
Accommodates additional instrumentation |
Yes (E.g. ellipsometry) |
Fast measurement speed |
Up to 500 measurements per second |
Sample size |
~ 10mm X 10mm |