Test grating TGX1 is intended for:
- lateral calibration of SPM scanners;
- detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects;
- determination of the tip aspect ratio.
Grating description
|
Structure |
the grating is formed on Si wafer top surface |
|
Pattern types |
chessboard-like array of square pillars with sharp undercut edges |
|
Period |
3±0,05µm |
|
Edge curvature radius |
less than 10nm |
|
Chip size |
5x5x0,5mm |
|
Effective area |
central square 3x3mm |
|
Height |
0,6µm* |
* - the dimensions marked * are given for information only.
Fig.1 SPM image of TGX1 grating