Grating set for SPM lateral and vertical calibration, detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip shape.
Grating set TGS2 can be used for:
- lateral and vertical calibration;
- detection of lateral non-linearity;
- detection of hysteresis, creep, and cross-coupling effects;
- detection of angular distortion;
- for 3-D visualization of the scanning tip;
- determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.