Grating set for Z-axis SPM calibration with three different height range - 20nm, 110nm, 520nm. Calibration grating set TGS1 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
Grating set contains 3 gratings TGZ1, TGZ2, TGZ3 with different step heights.
Grating set contains 3 gratings TGZ1, TGZ2, TGZ3 with different step heights.
Descrizione del reticolo
| Structure: | - Si wafer - the grating is formed on the layer of SiO2 |
| Pattern types: | 1- Dimensional (in Z-axis direction) |
| Step height: | TGZ1 - 21,6±1.5 nm TGZ2 - 107±2 nm TGZ3 - 560±4 nm |
| Period: | 3±0,1 µm |
| Chip size: | 5x5x0,5 mm |
| Effective area: | central square 3x3 mm |
