Noncontact SPM probes NSG10 series with Au conductive coating, resonant frequency 140-390kHz, force constant 3,1-37,6N/m.

 

NSG10/Au series specification

Material

Single Crystal Silicon, N-type, 0.01-0.025 Ohm-cm, Antimony doped

Chip size

3.4x1.6x0.3mm

Reflective side

Au

Conductive coating

Au (35nm), Ti adhesion layer (25A)

Cantilever number

1 rectangular

Tip curvature radius

~ 35nm

Also available coatings

conductive TiN, PtIr

Available NSG10 probe 

bare, tipless, with Al reflective coating

   

Cantilever series

Cantilever length, L±5µm

Cantilever width, W±3µm

Cantilever thickness,

T±0.5 µm

Resonant frequency, kHz

Force constant, N/m

min

typical

max

min

typical

max

NSG10

95

30

2.0

140

240

390

3.1

11.8

37.6