Grating sets

Grating set for Z-axis SPM calibration with three different height range - 20nm, 110nm, 520nm.

Grating set for SPM lateral and vertical calibration, detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip shape.

Calibration grating set TGS1 (consists of three gratings TGZ1, TGZ2, TGZ3) with PTB traceable certificate.

Full set of calibration standards for SPM lateral and vertical calibration (including submicron calibration and simultaneuos calibration in X, Y and Z directions) , detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip shape.

Set of calibration standards for SPM with International Calibration Cetficates. Intended for lateral and vertical calibration (including submicron calibration and simultaneuos calibration in X, Y and Z directions) , detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip shape.

Grating set for Z-axis SPM calibration with four different height range - 20nm, 110nm, 520nm, 1400nm.