Calibration grating  TGZ3 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.



Grating description


- Si wafer
- the grating is formed on the layer of SiO2

Pattern types:

1- Dimensional (in Z-axis direction)

Step height:

TGZ3 - 560±4 nm


3±0,05 µm

Chip size:

5x5x0,5 mm

Effective area:

central square 3x3 mm


Fig.1 SEM photo of grating TGZ series