Calibration grating TGZ3 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
Grating description
Structure: |
- Si wafer |
Pattern types: |
1- Dimensional (in Z-axis direction) |
Step height: |
TGZ3 - 560±4 nm |
Period: |
3±0,05 µm |
Chip size: |
5x5x0,5 mm |
Effective area: |
central square 3x3 mm |
Fig.1 SEM photo of grating TGZ series