Grating set for SPM lateral and vertical calibration, detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip shape.
 

Grating set TGS2 consists of 6 calibration gratings - TGZ1, TGZ2, TGZ3, TGX1, TGG1, TGT1.

Grating set TGS2 can be used for:

  • lateral and vertical calibration;
  • detection of lateral non-linearity;
  • detection of hysteresis, creep, and cross-coupling effects;
  • detection of angular distortion; 
  • for 3-D visualization of the scanning tip;
  • determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.