Grating set for Z-axis SPM calibration with four different height range - 20nm, 110nm, 520nm, 1400nm.

Grating set contains 4 gratings TGZ1, TGZ2, TGZ3, TGZ4with different step heights.

 

 

 

 

 

 

Descrizione dei reticoli

Structure:	- Si wafer - the grating is formed on the layer of SiO2
Pattern types:	1- Dimensional (in Z-axis direction)
Step height:	TGZ1 - 21.6±1.5 nm TGZ2 - 107±2 nm TGZ3 - 560±4 nm TGZ4 - 1317±10 nm
Period:	3±0,1 µm
Chip size:	5x5x0.5 mm
Effective area:	central square 3x3 mm

 

 

 

 

 

 

 

 

 

 

 

 

Fig.1 SEM photo of TGZ3 grating