Grating set for Z-axis SPM calibration with four different height range - 20nm, 110nm, 520nm, 1400nm.

Grating set contains 4 gratings TGZ1, TGZ2, TGZ3, TGZ4with different step heights.







Descrizione dei reticoli

Structure: - Si wafer
- the grating is formed on the layer of SiO2
Pattern types: 1- Dimensional (in Z-axis direction)
Step height: TGZ1 - 21.6±1.5 nm
TGZ2 - 107±2 nm
TGZ3 - 560±4 nm
TGZ4 - 1317±10 nm
Period: 3±0,1 µm
Chip size: 5x5x0.5 mm
Effective area: central square 3x3 mm













Fig.1 SEM photo of TGZ3 grating