Calibration grating TGZ4 is intended for Z-axis calibration of scanning probe microscopes and nonlinearity measurements.
Grating description
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Structure:
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- Si wafer
- the grating is formed on the layer of SiO2 |
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Pattern types:
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1- Dimensional (in Z-axis direction)
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Step height:
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TGZ4 - 1317±10 nm
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Period:
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3±0,05 µm
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Chip size:
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5x5x0,5 mm
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Effective area:
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central square 3x3 mm
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Fig.1 SEM photo of grating TGZ series